Download Compact Plasma and Focused Ion Beams by Sudeep Bhattacharjee PDF

By Sudeep Bhattacharjee

Recent learn has introduced the appliance of microwaves from the classical fields of heating, conversation, and iteration of plasma discharges into the new release of compact plasmas that may be used for purposes similar to FIB and small plasma thrusters. even though, those new functions convey with them a brand new set of demanding situations. With assurance starting from the fundamentals to new and rising functions, Compact Plasma and centred Ion Beams discusses how compact high-density microwave plasmas with dimensions smaller than the geometrical cutoff measurement will be generated and applied for delivering concentrated ion beams of assorted components.

Starting with the basics of the cutoff challenge for wave propagation in waveguides and plasma diagnostics, the writer is going directly to clarify intimately the plasma creation through microwaves in a compact geometry and slim tubes. He then completely discusses wave interplay with bounded plasmas and offers a deeper figuring out of the physics. The e-book concludes with an updated account of contemporary examine on pulsed microwaves and the applying of compact microwave plasmas for multi-element FIB.

It offers a consolidated and unified description of the rising components in plasma technology and expertise using wave-based plasma assets in response to the author’s personal paintings and adventure. The ebook can be precious not just to demonstrated researchers during this zone yet also will function a good creation to these attracted to using those rules to numerous present and new applications.

Show description

Read or Download Compact Plasma and Focused Ion Beams PDF

Similar microwaves books

Patterns of Light: Chasing the Spectrum from Aristotle to LEDs

This booklet starts off by way of addressing houses of sunshine as obvious within the daily global: occasions comparable to refraction in a pool, lenses within the type of glasses, the colours of items, atmospheric occasions, and so forth. Latter chapters might clarify those occasions on the atomic and subatomic point and tackle using electron and optical microscopy in gazing the worlds unseen through the unaided eye.

Encyclopedia of RF and Microwave Engineering

RF and Microwave Engineering is likely one of the quickest development parts of the previous decade and should most likely stay a truly energetic region of study and alertness in a wide number of fields. The six quantity set of Encyclopedia of RF and Microwave Engineering illustrates how this box has been the main to permitting expertise accountable for the exceptional progress of instant communications.

Elektrotechnik für Maschinenbauer

? ber den Autor/HrsgProf. Dipl. -Ing. Hermann Linse, Esslingen (verst. ) Prof. Dr. -Ing. Rolf Fischer, FH Esslingen

Microwave Engineering: Concepts and Fundamentals

Features

Encompasses just about all facets of microwave iteration, measurements, and processing, giving each one subject equivalent weight
Describes ferrite units, hollow space resonators, semiconductor and RF/microwave units, and microwave built-in circuits
presents an outstanding figuring out of wave propagation, mirrored image and refraction, guided waves, and transmission lines
Discusses sorts of microwave parts, antennas, tubes, transistors, diodes, and parametric devices
features a myriad of illustrations, homework difficulties, references, and numerical examples

Solutions handbook and PowerPoint® slides to be had with qualifying direction adoption
Summary

Detailing the lively and passive points of microwaves, Microwave Engineering: ideas and basics covers every little thing from wave propagation to mirrored image and refraction, guided waves, and transmission traces, supplying a entire figuring out of the underlying ideas on the middle of microwave engineering. This encyclopedic textual content not just encompasses approximately all features of microwave engineering, but additionally supplies all topics—including microwave new release, size, and processing—equal emphasis. jam-packed with illustrations to help in comprehension, the book:

Describes the mathematical idea of waveguides and ferrite units, devoting a complete bankruptcy to the Smith chart and its applications
Discusses forms of microwave parts, antennas, tubes, transistors, diodes, and parametric devices
Examines numerous attributes of hollow space resonators, semiconductor and RF/microwave units, and microwave built-in circuits
Addresses scattering parameters and their houses, in addition to planar constructions together with striplines and microstrips
Considers the constraints of traditional tubes, habit of charged debris in numerous fields, and the concept that of speed modulation

Based at the author’s personal type notes, Microwave Engineering: strategies and basics includes sixteen chapters that includes homework difficulties, references, and numerical examples. PowerPoint® slides and MATLAB®-based options can be found with qualifying direction adoption.

Extra info for Compact Plasma and Focused Ion Beams

Sample text

Ohi, A.  Kawai. 1991. Overdense plasma production using electron cyclotron waves, J. Phys. Soc. Jpn. 60: 1600–1607. 3. M. Sugimoto, M. Tanaka, and Y. Kawai. 1996. Electron cyclotron wave plasma production using a concave lens, Jpn. J. Appl. Phys. 35: 2803–2807. 4. Y. T. A. D. D. C. Lok. 1991. Electrons cyclotron resonance plasma chemical vapor deposition of large area uniform silicon nitride films, J. Vac. Sci. Technol. 9: 3071–3077. 5. J. Forster and W. Holber. 1989. Plasma characterization for a divergent field electron cyclotron resonance source, J.

Electron cyclotron resonance plasma in multicusp magnets with axial magnetic plugging, Rev. Sci. Instrum. 65: 3751–3755. 22. S. Satoru and N. Sato. 1991. Plasma structures in an electron cyclotron resonance plasma processing device, J. Appl. Phys. 70: 4165–4171. 23. J. Asmussen. 1989. Electron cyclotron resonance microwave discharges for etching and thin-film deposition, J. Vac. Sci. Technol. A 7: 883–893. 24. E. C. L. L. Cecchi. 1992. Plasma uniformity and power deposition in electron cyclotron resonance etch tools, J.

41) Review of the Cutoff Problem 29 References 1. H. A. Dandl. 1989. Preferential electron–cyclotron heating of hot electrons and formation of overdense plasmas, Phys. Fluids B 1: 2010–2017. 2. M. Tanaka, R. Nishimoto, S. Higashi, N. Harada, T. Ohi, A.  Kawai. 1991. Overdense plasma production using electron cyclotron waves, J. Phys. Soc. Jpn. 60: 1600–1607. 3. M. Sugimoto, M. Tanaka, and Y. Kawai. 1996. Electron cyclotron wave plasma production using a concave lens, Jpn. J. Appl. Phys. 35: 2803–2807.

Download PDF sample

Rated 4.93 of 5 – based on 37 votes